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dc.date.accessioned2016-01-17T13:59:10Z
dc.date.available2016-01-17T13:59:10Z
dc.date.issued2015
dc.identifier.urihttp://hdl.handle.net/10852/48596
dc.description.abstractMicrofluidics is considered as both science and technology that deal with fluids in microchannels or in micro scale space. During the past two decades, microfluidic has been the hot spot in various research areas, e.g., biomedical assay, microchemical system, thermal management of electronic device, micro-electro-mechanical systems, etc., due to the emergences of various microfluidic devices. Transduction and sensing for microfluids therefore attract numerous interests from the diverse fields. Interdigital capacitance comprising of interdigital electrodes (IDEs) and thin insulation film provides a feasible solution for microfluidic transduction. Particularly, it has coplanar configuration and can be easily realized by use of microfabrication processes. Hence, it is of great interest to integrate the interdigital capacitance into a microsystem device for microfluidic transduction. This thesis explores the promising applications of interdigital capacitance for microfluidic generation and sensing. Due to its inherent flexibility, fluidic energy harvester has obtain many attentions. The conventional electrostatic energy harvesters have been proposed to convert the ambient vibration to electric energy, often seen with solid spring-mass configurations. The springmass structure takes full advantages of resonant vibration to give maximum output power at a narrow frequency band; however, it in the meantime brings challenges to be adapted for wideband and low frequency applications. To overcome these challenges, a fluidic electrostatic energy harvester is proposed with employment of interdigital capacitance with a thin PTFE film deposited by sputtering process. Owing to charges embedded inside the dielectric film, no extra charging process is required. When a conductive droplet or ionic liquid marble rolls across the interdigital capacitance, this fluidic energy harvester can output an electric power. Capacitance variation and open circuit voltage of the fluidic energy harvester was determined by finite element method (FEM) simulation when the droplet was at different position with respect to the IDEs. The charges on the IDEs were also checked. It is found that when the IDEs with given dimensions of finger/gap width, the total capacitance variation increases rapidly with the increase of droplet size to a peak value, and then drops as the droplet size keeps increasing, even turning to be negative when the droplet size is big enough to cover more than one pair of fingers. Microfabrication processes have been used to fabricate a prototype of this fluidic energy harvester. Experimental investigations of the fluidic energy harvester were conducted with both mercury droplet and ionic liquid marble. With a 1.2-mm mercury droplet rolling across the electret film of the prototype, a maximum output power was obtained at 0.18 ??W and the peak value of the output voltage was 1.5 V. A semi-empirical model was developed to understand the output waveforms. Several factors influencing the output performance are discussed. This fluidic electrostatic energy harvester is especially suitable for very low frequency vibration up to a few Hz. To explore the sensing capability of interdigital capacitance for microfluids, a microfluidic flow pattern sensor was also proposed and demonstrated, in which the insulation film was made of SU-8 rather than PTFE film. This microfluidic flow pattern sensor operates on capacitance variation corresponding to different flow regime passing across the sensing area. The prototype of the flow pattern sensor composed of the glass substrate, IDEs covered by the thin insulation film, and the PDMS cover, therefore to form a microchannel. Experimental investigation on the microfluidic flow pattern senor was performed by use of deioned water and olive oil. The capacitance variation was characterized corresponding to 3 typical flow patterns, namely, droplet flow, short slug flow, and long slug flow. According to the data of time-dependent capacitance variation, both velocity and size of the flow regime can be determined due to that the sensing length of the sensor is known. The constants specific to each flow pattern are calculated so that the microfluidic flow pattern can be easily identified. This microfluidic flow pattern sensor can be easily integrated into complicated microsystems as all the fabrication processes are compatible. With the demonstrations of fluidic electrostatic energy harvester and microfluidic flow pattern sensor, we may conclude that interdigital capacitance is very promising for microfluidic generation and sensing, due to the coplanar configuration and the capability of non-invasive operation.en_US
dc.language.isoenen_US
dc.relation.haspartPaper 1 Zhaochu Yang, Einar Halvorsen, Tao Dong. Power generation from conductive droplet sliding on electret film. Appl. Phys. Lett. 100, 213905 (2012). © 2012 American Institute of Physics. http://dx.doi.org/10.1063/1.4720517
dc.relation.haspartPaper 2 Zhaochu Yang, Einar Halvorsen, Tao Dong. Capacitance variation in electrostatic energy harvester with conductive droplet moving on electret film. PowerMEMS 2013, Journal of Physics: Conference Series 476 (2013) 012094. Published under the terms of the Creative Commons Attribution 3.0 licence. http://dx.doi.org/10.1088/1742-6596/476/1/012094
dc.relation.haspartPaper 3 Zhaochu Yang, Einar Halvorsen, Tao Dong. Electrostatic Energy Harvester Employing Conductive Droplet and Thin-Film Electret. Journal of Microelectromechanical Systems, vol. 23, no. 2, 2014, 315-323. The paper is removed from the thesis due to publisher restrictions. The published version is available at: http://dx.doi.org/10.1109/JMEMS.2013.2273933
dc.relation.haspartPaper 4 Zhaochu Yang, Tao Dong and Einar Halvorsen. Identification of microfluidic two-phase flow patterns in lab-on-chip devices. Bio-Medical Materials and Engineering 24 (2014) 77– 83. The paper is removed from the thesis due to publisher restrictions. The published version is available at: http://dx.doi.org/10.3233/BME-130786
dc.relation.haspartPaper 5 Zhaochu Yang, Tao Dong, Atle Jensen, Einar Halvorsen. Integratable Capacitive Sensor for Identification of Microfluidic Two-phase Flow Patterns in Lab-on-chip Devices. Submitted to Journal of Microelectromechanical Systems, JMEMS-2014-0360 Journal of Microelectromechanical Systems, 04 December 2015. The paper is removed from the thesis due to publisher restrictions. The published version is available at: http://dx.doi.org/10.1109/JMEMS.2015.2502281
dc.relation.urihttp://dx.doi.org/10.1063/1.4720517
dc.relation.urihttp://dx.doi.org/10.1088/1742-6596/476/1/012094
dc.relation.urihttp://dx.doi.org/10.1109/JMEMS.2013.2273933
dc.relation.urihttp://dx.doi.org/10.3233/BME-130786
dc.relation.urihttp://dx.doi.org/10.1109/JMEMS.2015.2502281
dc.titleMicrofluidic sensing and power generation with coplanar interdigital capacitorsen_US
dc.typeDoctoral thesisen_US
dc.creator.authorYang, Zhaochu
dc.identifier.urnURN:NBN:no-52468
dc.type.documentDoktoravhandlingen_US
dc.identifier.fulltextFulltext https://www.duo.uio.no/bitstream/handle/10852/48596/1/PhD-Yang-DUO.pdf


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