The CERN Large Hadron Collider (LHC) will undergo a major upgrade to increase its instantaneous luminosity, allowing precision measurements of known processes and the search of new physics. The renewed machine requires an upgrade of several subdetectors of its experiments, including silicon trackers. This work focuses on the design and integration of novel radiation-hard monolithic CMOS pixel sensors for new trackers, such as ATLAS ITk. Two sensors have been produced using a process modification of a 180 nm CMOS technology: a large scale prototype (MALTA) and a small scale prototype (MiniMALTA). The sensors implement fully depleted square pixels of 36 micrometers with a small collection electrode, a fast front-end, and a novel asynchronous architecture. Each of these factors contributes to an efficient and low-power design.
The work includes the design of a low-power 5 Gb/s data driver and receiver integrated in both sensors.
Finally, the integration of monolithic sensors in tracker systems has been addressed with studies on the design of a module prototype and the development of a CMOS compatible microfabrication technique to implement silicon-embedded microchannels cooling.