Composition and structure of Pd nanoclusters in SiOx thin film

Thøgersen, Annett; Mayandi, Jeyanthinath; Vines, Lasse; Sunding, Martin Fleissner; Olsen, Arne; Diplas, Spyridon; Mitome, Masanori; Bando, Yoshio
Journal article; PublishedVersion; Peer reviewed
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Year
2011
Permanent link
http://urn.nb.no/URN:NBN:no-60555

CRIStin
844445

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Original version
Journal of Applied Physics. 2011, 109 (8):084329, DOI: http://dx.doi.org/10.1063/1.3561492
Abstract
The nucleation, distribution, composition, and structure of Pd nanocrystals in SiO2 multilayers containing Ge, Si, and Pd are studied using high resolution transmission electron microscopy (HRTEM) and x-ray photoelectron spectroscopy (XPS), before and after heat treatment. The Pd nanocrystals in the as deposited sample (sample ASD) seem to be capped by a layer of PdOx. A 1–2 eV shift in binding energy was found for the Pd-3d XPS peak, due to initial state Pd to O charge transfer in this layer. The heat treatment results in a decomposition of PdO and Pd into pure Pd nanocrystals and SiOx.

This research was originally published in the Journal of Applied Physics. © AIP Publishing