Browsing Kjemisk institutt by Author "Sajavaara, T"

Now showing items 1-1 of 1

  • The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges 
    Napari, M; Tarvainen, O; Kinnunen, S; Arstila, K; Julin, J; Fjellvåg, Øystein Slagtern; Weibye, Kristian; Nilsen, Ola; Sajavaara, T (Journal article / Tidsskriftartikkel / SubmittedVersion, 2017)
    Two distinguishable plasma modes in the O2–N2 radio frequency capacitively coupled plasma (CCP) used in remote plasma-enhanced atomic layer deposition (PEALD) were observed. Optical emission spectroscopy and spectra ...