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The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
(Journal article / Tidsskriftartikkel / SubmittedVersion, 2017)
Two distinguishable plasma modes in the O2–N2 radio frequency capacitively coupled plasma (CCP) used in remote plasma-enhanced atomic layer deposition (PEALD) were observed. Optical emission spectroscopy and spectra ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2017)
In the present contribution we assess the luminescent properties of amorphous europium titanium phosphate thin films. The films have been deposited by atomic layer deposition, using the precursor combinations Eu(thd)3 (thd ...
(Journal article / Tidsskriftartikkel / AcceptedVersion; Peer reviewed, 2013)
Ln2O3 thin films with optically active f-electrons (Ln = Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb) have been grown on Si(100) and soda lime glass substrates by atomic layer deposition (ALD) using Ln(thd)3 (Hthd = ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2014)
Luminescent europium titanium oxides (EuxTiyOz) have been deposited as thin films by atomic layer deposition (ALD) in the temperature range 225 to 375 °C with control of the stoichiometry from pure TiO2 to pure Eu2O3, and ...
(Journal article / Tidsskriftartikkel / Published version; Peer reviewed, 2013)
The ferroelectric and electro-optical properties of LiNbO3 make it an important material for current and future applications. It has also been suggested as a possible lead-free replacement for present PZT-devices. The ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2016)
Thin films of complex alkali oxides are frequently investigated due to the large range of electric effects that are found in this class of materials. Their piezo- and ferroelectric properties also place them as sustainable ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2020)
Abstract
Luminescent materials enable warm white LEDs, molecular tagging, enhanced optoelectronics and can improve energy harvesting. With the recent development of multi-step processes like down- and upconversion ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2020)
Nanoporous amorphous silicon (a-Si) with <5 nm cylindrical pores have been fabricated by phase separation of aluminum (Al) and silicon, forming self-assembled Al nanowires (NWs), followed by subsequent removal of Al by wet ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2020)
Thin films of metal–organic frameworks (MOFs) are promising for a wide range of applications including membranes for separations and sensor materials in microelectronics. Growth of such thin films using atomic/molecular ...
(Journal article / Tidsskriftartikkel / AcceptedVersion; Peer reviewed, 2020)
Plasmon-enhanced harvesting of photons has contributed to the photochemical conversion and storage of solar energy. However, high dependence on noble metals and weak coupling in heterostructures constrain the progress ...