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The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
(Journal article / Tidsskriftartikkel / SubmittedVersion, 2017)
Two distinguishable plasma modes in the O2–N2 radio frequency capacitively coupled plasma (CCP) used in remote plasma-enhanced atomic layer deposition (PEALD) were observed. Optical emission spectroscopy and spectra ...
(Journal article / Tidsskriftartikkel / Published version; Peer reviewed, 2013)
The ferroelectric and electro-optical properties of LiNbO3 make it an important material for current and future applications. It has also been suggested as a possible lead-free replacement for present PZT-devices. The ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2017)
In the present contribution we assess the luminescent properties of amorphous europium titanium phosphate thin films. The films have been deposited by atomic layer deposition, using the precursor combinations Eu(thd)3 (thd ...
(Journal article / Tidsskriftartikkel / AcceptedVersion; Peer reviewed, 2018)
nm-Range forces acting between calcite surfaces in water affect macroscopic properties of carbonate rocks and calcite-based granular materials and are significantly influenced by calcite surface recrystallization. We suggest ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2019)
Potassium sodium niobate (KNN) has long been considered a viable candidate for replacing lead‐based materials in piezo‐ and ferroelectric devices. The introduction of KNN on an industrial scale is highly awaited; however, ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2020)
As traditional silicon technology is moving fast towards its fundamental limits, all-oxide electronics is emerging as a challenger offering principally different electronic behavior and switching mechanisms. This technology ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2019)
The authors here report epitaxial growth of the ferrimagnet NixFe3–xO4 (NFO) by atomic layer deposition at low temperatures. Films grow epitaxially at a reactor temperature of 250 °C and require no further postannealing ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2019)
We have constructed thin films of organic–inorganic hybrid character by combining titanium tetra-isopropoxide (TTIP) and the nucleobases thymine, uracil or adenine using the molecular layer deposition (MLD) approach. Such ...
(Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2020)
Amorphous thin films of FePO4 and Fe4(P2O7)3 show excellent power capabilities and good stability as cathode materials in Li-ion batteries. Within our tested range of materials, 10 nm FePO4 shows the best results and can ...
(Journal article / Tidsskriftartikkel / AcceptedVersion; Peer reviewed, 2017)
We demonstrate controlled deposition by atomic layer deposition of YVO4:Yb3+ thin films exhibiting an intense NIR emission under UV excitation after post-deposition annealing at 1000 °C. The samples are deposited using the ...