High-k dielectric thin films: characterization and application in RF MEMS capacitive switches

Min, Deokki
Doctoral thesis
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Year
2013
Permanent link
http://urn.nb.no/URN:NBN:no-39216

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Abstract
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List of papers
Paper I: Deokki Min, Nils Hoivik, Geir Uri Jensen, and Ulrik Hanke. Microwave properties of PZT/ZrO2 thin films for RF MEMS capacitive shunt switches. Proceedings of the MEMSWAVE 2009, July 6-8, 2009, Trento, Italy, pp 105-108. The paper is removed from the thesis in DUO.
Paper II: D. Min, N. Hoivik, G. U. Jensen, and U. Hanke. Microwave characterization of PZT/ZrO2 thin films. Proceedings of the European Microwave Week 2010, September 26 - October 1, 2010, Paris, France, pp. 1579-1582. The paper is removed from the thesis in DUO.
Paper III: D. Min, N. Hoivik, G. U. Jensen, F. Tyholdt, C. Haavik, and U. Hanke. Dielectric properties of thin-film ZrO2 up to 50 GHz for RF MEMS switches. Applied Physics A, December 2011, Volume 105, Issue 4, pp 867-874 The paper is removed from the thesis in DUO due to publisher restrictions. The published version is available at: https://doi.org/10.1007/s00339-011-6582-y
Paper IV: D. Min, N. Hoivik, and U. Hanke. Journal of Electroceramics February 2012, Volume 28, Issue 1, pp 53-61. The paper is removed from the thesis in DUO due to publisher restrictions. The published version is available at: https://doi.org/10.1007/s10832-011-9677-0
Paper V: D. Min, N. Hoivik, G. U. Jensen, F. Tyholdt, and U. Hanke. The microwave dielectric properties of dual-layer PZT/ZrO2 thin films deposited by chemical solution deposition. Journal of Physics D: Applied Physics, 2011, 44 255404. The paper is removed from the thesis in DUO due to publisher restrictions. The published version is available at: https://doi.org/10.1088/0022-3727/44/25/255404
Paper VI: D. Min, K. Wang, N. Hoivik and U. Hanke. Study on Cu/Sn SLID interconnects for RF applications. Proceedings of the IMAPS Nordic conference, September 14-16, 2008, Helsingør, Denmark, pp. 135-139. The paper is removed from the thesis in DUO.
Paper VII: D. Min, N. Hoivik, and U. Hanke. Enhanced wet etching process of PZT/ZrO2 thin films for RF MEMS capacitive switches. Proceedings of the 22nd Micromehanics and Micro systems Europe Workshop, June 19-22, 2011, Tønsberg, Norway, pp. 56-80. The paper is removed from the thesis in DUO.